Science & Technology
Science and Technology
Science and Technology
Tue, January 27, 2009
Tegal Receives Order for Silicon DRIE Multi-Module Cluster Tool From High Volume Manufacturer of MEMS Sensors
PETALUMA, Calif.--([ BUSINESS WIRE ])--Tegal Corporation (Nasdaq:TGAL), a leading designer and manufacturer of DRIE, plasma etch, and deposition systems used in the production of MEMS, power semiconductor, and optoelectronic devices, announced today that the Company received an order for a Tegal DRIE 3200 multi-module cluster tool from a high volume manufacturer of MEMS sensors. The Tegal DRIE 3200 tool will ship in the second quarter of CY2009, and will be used by Tegal's customer to immediately expand MEMS sensor HVM production capabilities, and to bring important new sensor products on-line later in CY2009.
"This is an important win for Tegal Corporation and for our DRIE 3200 Advanced ICP System, confirming as it does both Tegal's DRIE technical leadership and Tegal's added value providing customers with reliable, production-worthy DRIE tools and superior post-sales customer support," said Peter Dijkstra, Vice President of Global Sales, Tegal Corporation. "Our customer chose Tegal after a head-to-head competition weighing silicon DRIE process results and industry references regarding equipment supplier reputations for customer support and service. Our customer concluded Tegal's value proposition for DRIE cluster tool systems is second to none in the industry, and we are pleased to have been chosen for this silicon DRIE tool order as a result."
MEMS sensor manufacturing is expected to demonstrate continued growth in the near-term, as MEMS sensors become more and more embedded in smartphone, consumer electronic, medical diagnostic, and automotive applications. Silicon DRIE processing is at the heart of MEMS sensor manufacturing, and is also becoming an increasingly important process application for modern power device fabrication.
Tegal's DRIE 3200 cluster tool system is a high-density plasma etch tool featuring an inductively coupled plasma etch reactor and magnetic plasma confinement. The tool can run Tegal's patented SHARP – Super High Aspect Ratio Process, achieving etched feature aspect ratios of >100:1 in production environments. Together with its high reliability, broad process window, and high etch rates, the Tegal DRIE 3200 system is a critical enabler for etching the Silicon and SOI substrates found in the MEMS/MOEMS, Power Device, photovoltaic, bio-tech, and hi-voltage markets.
Safe Harbor Statement
Except for historical information, matters discussed in this news release contain forward-looking statements within the meaning of Section 27A of the Securities Act and Section 21E of the Exchange Act. Forward-looking statements, which are based on assumptions and describe our future plans, strategies and expectations, are generally identifiable by the use of the words "anticipate," "believe," "estimate," "expect," "intend," "project" or similar expressions. These forward-looking statements are subject to risks, uncertainties and assumptions about the Company including, but not limited to industry conditions, economic conditions, acceptance of new technologies and market acceptance of the Company's products and services. All forward-looking statements attributable to us or persons acting on our behalf are expressly qualified in their entirety by the cautionary statements in this paragraph. For a further discussion of these risks and uncertainties, please refer to the Company's periodic filings with the Securities and Exchange Commission.
About Tegal
Tegal sells production-qualified process tools for commercial fabrication of MEMS, power semiconductor, and optoelectronic devices. Incorporating unique, patented, etch and deposition technologies, our installed base of more than 1,700 etch and deposition systems is backed by 35+ years of continuous technology improvements, and over 100 patents. We've earned a reputation among our customers for award-winning support, and for supplying reliable, value-oriented systems, for Silicon DRIE MEMS and Power Device etch, AlN PVD and PZT plasma etch, precision descum, and stress controlled metal film PVD. Some examples of products enabled by Tegal technology are power management modules found in portable computers, cellphones, and handheld consumer electronic gear; megapixel imaging chips used in digital and cellphone cameras; power amplifiers for portable handsets and wireless networking; and MEMS devices like accelerometers for consumer electronics, gaming, and automotive safety and stability control, microfluidic control devices for ink jet printers, and laboratory-on-a-chip medical test kits.
For more information about Tegal Corporation, please visit: [ www.tegal.com ]
