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Brukera?s New AcuityXR Technology Breaks Diffraction Limit

^{Published on 2010-11-29 12:40:59 - Market Wire}
 

BOSTON--([ BUSINESS WIRE ])--Bruker Corporation (NASDAQ: BRKR) announced today at the Materials Research Society (MRS) Fall 2010 Meeting the AcuityXRa", a novel optical surface profiler mode that combines unique, patent-pending Bruker hardware and software technology to enable select ContourGTa" non-contact, 3D optical surface profilers to break the optical diffraction limit and deliver lateral resolutions that were previously considered impossible to achieve.

"This remarkable new capability, which is exclusively available on ContourGT systems, is a great benefit to both our current and prospective customers in semiconductor, medical and precision machining applications where feature sizes are shrinking while the need for quality is continuously increasing."

Many nanoscale applications in the semiconductor, medical and precision machining fields today have surface features and defects with dimensions that limit detection or identification due to the optical diffraction limit. Such miniscule features and defects often directly affect function, performance, quality and/or manufacturing yields and are of great interest to researchers and production QA/QC personnel alike. Bruker optical surface profiler systems equipped with the new AcuityXR mode have shown resolution of features below 130 nanometers in width, which is unprecedented in optical microscopy and is nearly three times finer than for systems without this technology. Furthermore, AcuityXR enables this new level of precision while preserving the wide field-of-view and high performance benefits of Bruker non-contact, 3D optical surface profiling. With AcuityXR, dimensional repeatability on narrow structures has been shown to improve by more than a factor of 5x, showing a true metrology benefit to the technology in addition to its ability to reveal exceptionally fine features. AcuityXR is an optional capability that is now available on Bruker ContourGT-K1, X3 and X8 optical surface profilers.

aAcuityXR combines radically new measurement algorithms with the enhanced metrology hardware technology in the ContourGT-K1, X3 and X8 systems that together deliver lateral resolutions never before achieved in optical microscopy,a said Mr. Ross Q. Smith, Vice President and General Manager of Brukera™s Stylus & Optical Metrology Unit. aThis remarkable new capability, which is exclusively available on ContourGT systems, is a great benefit to both our current and prospective customers in semiconductor, medical and precision machining applications where feature sizes are shrinking while the need for quality is continuously increasing.a

Dr. Mark R. Munch, President of the Bruker Nano Surfaces Business, added: aAcuityXR builds upon the industry-leading performance, repeatability and ease-of-use capabilities of the ContourGT product family. Bringing this unprecedented achievement to market truly illustrates Brukera™s on-going commitment to provide the highest value nanosurface metrology systems to our industrial and R&D customers.a

AcuityXR and ContourGT at the MRS 2010 Fall Meeting

ContourGT systems equipped with AcuityXR will be demonstrated at the Bruker Nano Surfaces Booth (No. 300) at the MRS Fall Meeting held at the Hynes Convention Center in Boston, MA, November 30 through December 2. Bruker will be conducting a seminar on AcuityXR and other advanced optical surface measurement modes on Tuesday, November 30 at 6:30 PM in the Sheraton Boston Hotel, 3rd Floor, Beacon G.

About the ContourGT Family

Introduced earlier in 2010, the ContourGT family of non-contact, 3D optical surface profilers features Bruker-patented, high-brightness dual-LED illumination that, when combined with the systema™s superior vertical resolution, greatly improves sensitivity and stability and enables precision non-contact 3D surface metrology in difficult applications and environments that are challenging for other WLI-based systems. The ContourGT also features the new Bruker-developed and patent-pending Vision64a" operating and analysis software and the industrya™s most intuitive, modular user interface that provides user-level-customization capabilities for a wide range of surface profiling metrology applications. For more information on AcuityXR or the ContourGT, or to schedule a demo, please call +1 (520) 741-1044 ext. 3, email [ productinfo@bruker-nano.com ] or visit [ www.bruker-axs.com/contourgt_optical_profilers.html ].

About Bruker Corporation

Bruker Corporation is a leading provider of high-performance scientific instruments and solutions for molecular and materials research, as well as for industrial and applied analysis. For more information about Bruker Corporation, please visit [ www.bruker.com ].