Science & Technology
Thu, November 11, 2010Wed, November 10, 2010Tue, November 9, 2010Mon, November 8, 2010Sun, November 7, 2010Sat, November 6, 2010Fri, November 5, 2010Thu, November 4, 2010Wed, November 3, 2010Tue, November 2, 2010Mon, November 1, 2010Fri, October 29, 2010Thu, October 28, 2010Wed, October 27, 2010FSI International Receives Additional Multiple Unit ANTARES Orderfrom Leading Worldwide Logic Device Manufacturer
//science-technology.news-articles.net/content/2 .. leading-worldwide-logic-device-manufacturer.html
Published in Science and Technology on Wednesday, November 3rd 2010 at 22:40 GMT by Market Wire🞛 This publication is a summary or evaluation of another publication
MINNEAPOLIS--([ BUSINESS WIRE ])--FSI International, Inc. (Nasdaq: FSII) announced today that a leading Asia-based logic device producer has placed an additional order for multiple ANTARES® CryoKinetic cleaning systems. Once delivered, this will significantly expand the platforma™s installed base at this customer. The logic chip provider currently uses the ANTARES system for various BEOL particle removal processes, including inline probe testing. Unlike aqueous technologies, CryoKinetic cleaning technology is uniquely qualified for this application because of its all-dry defect removal method. The systems are expected to ship in the second and third quarters of fiscal 2011. The dual process chamber ANTARES systems range in price from $1.8 to $2.3 million, depending on configuration.
The ANTARES® System is a fully automated, single-wafer, CryoKinetic system used for processing 200/300mm wafers with capabilities to remove nanoscale particles. CryoKinetic processing technology is an all-dry, non-reactive process that removes particles through impact by high-velocity cryogenic Ar/N2 aerosol, and reduces defects without damaging the wafer surface, even on copper and porous low-k films. The systema™s highly efficient dry cleaning solution can be used for a variety of particle removal applications in FEOL and BEOL. Many of the leading logic device manufacturers worldwide utilize the ANTARES system for its defect reduction and yield improvement benefits.
FSI International, Inc. is a global supplier of surface conditioning equipment technology and support services for microelectronics manufacturing. Using the companya™s broad portfolio of cleaning products, which include batch and single-wafer platforms for immersion, spray, vapor and cryogenic aerosol technologies, customers are able to achieve their process performance, flexibility and productivity goals. The companya™s support services programs provide product and process enhancements to extend the life of installed FSI equipment, enabling worldwide customers to realize a higher return on their capital investment. FSI maintains a web site at [ http://www.fsi-intl.com ].